Inspection equipment working at sub-micron scale needs a motion platform that is immune to drift and vibration.
The multi-axis system with granite base frame uses a solid granite foundation, which naturally damps vibration and resists thermal change, to keep every axis aligned. Four ironless linear-motor-driven axes move payloads up to 25 kg across strokes of 830 × 720 mm. Positioning resolution reaches 0.1 µm, and repeatability is ±1 µm, so critical inspection optics hit their target on every pass. Top speed is 0.3 m/s with 2.5 m/s² acceleration, enough for high-throughput cells running three shifts a day. All cables stay hidden inside the axes, leaving the working area clear.
