+49 3641 63376-0info@jat-gmbh.de

 

 

Tailored Drive Solutions for Inspection Systems  

Take your inspection processes to the next level with JAT’s custom motion platforms. 

Request a custom solution

 

 

 

High-Precision Inspection Systems for the Semiconductor Industry

Precise Motion for Maximum Control

Inspection systems in semiconductor manufacturing face some of the toughest requirements: extreme precision, minimal vibration, absolute cleanroom compatibility and reliable repeatability. JAT supplies drive solutions tailored to the needs of developers, designers and technical buyers. Our motion platforms are mechanically, thermally and electronically harmonised to ensure consistent results. 

Typical applications in semiconductor inspection:
  • Wafer inspection: nanometre-accurate positioning for surface defect detection
  • AOI (Automated Optical Inspection): vibration-damped axes for optical accuracy
  • Lithography alignment: precise synchronisation for perfect mask overlay
  • Particle control: air-bearing axes for contact-free, low-particle motion
  • Thickness measurement: high-dynamic systems with exact repeatability
  • Optical alignment: sub-micrometre positioning of lenses and mirrors for photonics-based testing
  • X-ray inspection: stable motion under high loads for reliable results
  • Chip-bonding control: integration with imaging systems for full traceability  


Custom Drive System Potential Analysis

Discover in just 15 minutes how custom servo drives and drive systems can optimize your processes - free of charge.
Increase efficiency, precision and performance with drive solutions tailored to your manufacturing requirements.


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Industries and Application Areas

Our multi-axis systems are used in high-tech industries where maximum precision, dynamics and reliability are required:

Carbon-fibre gantry system mounted on granite base, equipped with JAT FAST4 positioning unit

Nanometre-accurate positioning systems
Air-bearing axes and lightweight carbon-fibre structures achieve repeatability down to 100 nm.

Vertical axis with JAT servo drive, visible encoder connections and cable routing

Platforms with ultra-flat rotary stages
Fully integrated feed systems for smooth and rapid inspection.

Granite frame with integrated dual gantry axes, designed for precise inspection tasks

Synchronised multi-axis gantries
Ideal for structured motion in imaging processes and AOI.

Granite-based multi-axis platform with linear stages and cable chain guides

Vibration-Free Motion for Critical Inspection Steps
Air bearing technology and granite bases absorb vibrations and minimize thermal effects.

High-performance linear motor stage with dual rail setup and energy chain system

Energy-efficient systems
Reduced power consumption thanks to optimised motion profiles and lightweight design.

Whether for SMEs with specific project needs or global semiconductor corporations with the highest scaling requirements, JAT delivers tailored solutions.

Request a custom solution now

What Drive Technology Must Deliver in Semiconductor Inspection

Inspection systems in semiconductor production rank among the most demanding motion applications.
The requirements are clear but technically challenging: 

  • Maximum precision: repeatability down to 100 nm
  • Vibration-free operation: critical for optical detection
  • Thermal stability: minimal expansion using granite and carbon-fibre structures
  • Cleanroom compatibility: ISO Class 5 components and air-bearing axes 
  • High dynamics: accelerations up to 500 m/s² for short cycle time
  • Modularity & scalability: adaptable to different inspection concepts
  • Synchronisation & control: exact coordination of multiple axes for scanning processes
  • Long-term stability: low-maintenance solutions with extended service life

JAT develops systems that not only meet these criteria but also make inspection processes scalable and efficient.

Technicians in cleanroom assembling precision drive components at a workstation

What our customer says:  "Fast commissioning and immediately ready-to-use systems accelerated our project start."

Your Benefits with JAT Inspection Solutions

  • Highest measurement accuracy through nanometre-level positioning

  • Improved process reliability with thermally stable axes

  • Energy efficiency with lightweight carbon-fibre structures

  • Future-proof through modular, expandable systems

  • Time and cost savings with turnkey solutions from one source

  • Cleanroom compatibility for reliable semiconductor production

Why Choose JAT for Inspection Systems?

  • Industry expertise down to the details
    JAT knows the challenges of semiconductor inspection first-hand, from lithography and AOI to substrate control. This know-how flows into every project.
  • Complete system solutions from one source
    Whether servo amplifier, axis, software or assembly, JAT provides the complete drive solution including development, simulation, testing and production.
  • Highest precision and quality - Made in Jena
    Located in the high-tech hub of Jena with in-house manufacturing under ISO 9001 & ISO 14001 standards, JAT guarantees reliability and sustainability.

Trust in proven quality


ISO 9001 & ISO 14001 certified
Guaranteed quality and environmental responsibility

Own development and production site
10,000 m² facility in Jena


Cleanroom manufacturing up to ISO Class 5
Ideal for semiconductor processes

Specialised in custom solutions
From prototype to series production


More than 200,000 delivered servo components worldwide
Reliability through experience

Sustainability
Developed and manufactured in a CO₂-neutral facility