High-precision Axis up to 1 m stroke

Granite beam with precision axis as a complete system with servo controller.

Technical Data

Max. velocity	0,5 m/s
Max. acceleration	1 m/s²
Scaleable stroke:	50 - 1000 mm
Reproducibility	0,5 µm
Positioning accuracy	5 µm
Positioning resolution	0,1 µm
Repeatability (side)	5 µm
Repeatability (height)	1 µm
Max. load	1 kg

Granite beam with a highly precise axis
Complete system including servo controller for various fieldbuses (EtherCAT, Profinet, CAN, ..)
For high-precision applications (wafer inspection, scanning, measurement)

Demands

Full-surface mounting on the machine frame
Including energy chain and assembled cable set
Delivery as a fully assembled and commissioned axis system
Accuracies guaranteed at ±2K constant temperature

Implementation

Developed for customer-specific requirements
Ironless linear motor with precision rail guide

Your request

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