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Wafer Handling with Nanometre Precision.

Increase productivity and precision in wafer handling with JAT’s custom drive solutions. 

Request a custom solution

 

Waferhandling-Systeme für höchste Ansprüche in der Halbleiterfertigung

Precision, speed and cleanroom compatibility in one solution 

Wafer handling is at the core of modern semiconductor production. Every stage, from wafering to final inspection, requires absolutely reliable, highly dynamic and contamination-free motion. JAT develops and delivers complete drive solutions that meet these requirements with precision. By combining air bearings, lightweight carbon-fibre technology, modular axis systems and cleanroom compatibility up to ISO Class 5, we cover the full spectrum from SMEs to global players.

Typical applications in semiconductor manufacturing that place the highest demands on drive technology:

  • Wafer transfer between process stations with contactless air bearing technology for particle-free handling 
  • Precise positioning in wafer steppers and lithography systems with repeat accuracies down to 100 nm
  • Automated wafer inspection systems with vibration-free axes for maximum image quality
  • Handling of thin or fragile substrates with thermally stable granite-based systems
  • Pick-and-place of chips and dies with ultra-light carbon-fibre axes for maximum acceleration
  • Integration of optical inspection systems for hybrid production processes


Custom Drive System Potential Analysis

Discover in just 15 minutes how custom servo drives and drive systems can optimize your processes - free of charge.
Increase efficiency, precision and performance with drive solutions tailored to your manufacturing requirements.


Make an appointment
 

JAT Solutions for Wafer Handling

With decades of industry experience and a broad technology portfolio, JAT develops complete handling systems for wafer applications, from concept to series production.

Proven solution examples:

System with 5 air bearing linear motor axes integrated into a table

Thermally stable granite gantry
For critical exposure processes, air-bearing axes, Z tilt-shift table for level control, control via servo amplifiers ECOVARIO® s

Air-bearing Granite-based XY inspection stage gantry system

Pick-and-place module
with accelerations up to 100 m/s², vibration-free and cleanroom-ready

Double gantry on granite base with twin synchronized axes from JAT

Camera-synchronised XY cross-table platform
ideal for AOI systems, achieving nanometre-accurate synchronised motion for exact image capture and evaluation

JAT Air-bearing rotary table, controlled by ECOVARIO servo amplifier

Air-bearing rotary table
with low profile for wafer handling in the sub-micrometre range, precisely controlled by ECOVARIO servo amplifiers

JAT Air-bearing CFRP precision axis

CFK base axis with air‑bearing carriage
stackable axis made of carbon‑fibre reinforced plastic for reduced weight, high acceleration and repeatability down to ±50 nm.

Positioning system
High-precision laser alignment with yaw error compensation and repeatability <100 nm

Whether for SMEs with specific project needs or global semiconductor corporations with maximum scaling requirements, JAT delivers tailored solutions. 

Request a custom solution

Application Requirements

Semiconductor production sets extremely high demands for wafer handling systems:

  • Nanometre precision: smallest structures require maximum repeatability
  • Vibration-free motion: mechanical impulses can cause defects
  • Contamination control: particles may render entire batches unusable
  • Temperature stability: minimal expansion ensures dimensional accuracy
  • High dynamics: short cycle times improve productivity
  • Process flexibility: rapid changeovers for different wafer sizes and processes

JAT meets these requirements with:

  • Air-bearing and carbon-fibre technology for particle-free, wear-free motion
  • Granite bases for thermal stability and vibration damping
  • Modular axis systems for fast process changeovers
  • High-dynamic servo drives with ECOVARIO® amplifiers and ECOSTUDIO® commissioning software
Technician adjusting a multi-axis platform

Customer testimonial:  "JAT’s drive solution for our wafer handling module cut our reject rate in half and reduced positioning times by 40 percent.”

Your Benefits with JAT in Wafer Handling

  • Increased yield: reduced reject rates through precise positioning
  • Higher productivity: faster cycle times at consistent quality
  • Lower operating costs: maintenance-free air bearings extend service life

  • Easy integration: interfaces compatible with existing equipment

  • Future-proof: scalable platforms for next process generations

Why Choose JAT for Wafer Handling

  • Complete drive solutions from one source

    From mechanical design through electronics and software to production and commissioning, JAT delivers a seamless, optimised system.

  • Long-term partnership and support

    Our application engineers accompany your project over the entire lifecycle to ensure consistent performance.

  • Process and industry know-how

    Decades of experience in semiconductor and cleanroom technology ensure solutions tailored to your production environment.

Proven Quality


ISO 9001 & ISO 14001 certified 
quality and environmental responsibility

Experience from over 5,000 projects in 45 countries 
global presence, local availability


Cleanroom manufacturing up to ISO Class 3
ideal for wafer handling systems

100% in-house expertise
from concept to series production


More than 200,000 delivered servo components worldwide  
reliability through experience

Sustainable production
  developed and manufactured in a CO₂-neutral facility