Fast 4PnP pick-and-place system for dynamic, high-precision cleanroom applications
JAT received the silver igus vector award for the system architecture of the Fast 4PnP ultra-precision system.
The system combines carbon lightweight construction, frictionless air bearings, and particle-reduced energy guidance.
The Fast 4PnP pick-and-place system from Jenaer Antriebstechnik was developed for applications that require high precision, high dynamics, and cleanroom suitability at the same time. By combining carbon lightweight construction, frictionless air bearings, and particle-reduced energy guidance, the system reaches accelerations of up to 100 m/s² with repeatability below 100 nm.
This makes the Fast 4PnP ultra-precision system suitable for semiconductor manufacturing, including direct imaging processes such as Step & Scribe, chip handling, and high-precision laser processing.
Precision and dynamics for the next generation of microelectronics
Requirements in semiconductor and electronics manufacturing continue to increase. Components are becoming smaller, structures are becoming finer, and process windows are becoming narrower. At the same time, manufacturers need higher production speed to remain economical.
This is where conventional pick-and-place systems increasingly reach their limits.
Many existing systems have to compromise between high speed and high precision. If dynamics are increased, positioning accuracy, process stability, or component protection may be affected. If the system is optimized for maximum precision, cycle times and productivity can suffer.
Additional challenges include:
- Mechanical wear caused by conventional guides
- Particle generation in cleanroom environments
- Thermal influences on sensitive processes
- Rising energy costs in highly dynamic motion sequences
With the Fast 4PnP submicrometer system, Jenaer Antriebstechnik addresses these requirements. The system combines nanometer-level precision with high acceleration and supports stable high-speed processes, even with sensitive components.
High dynamic pick-and-place system with air bearings
Accelerations up to 100 m/s²
The Fast 4PnP ultra-precision system was designed for dynamic motion. The combination of a highly rigid carbon structure and low moving mass enables fast point-to-point movements with accelerations of up to 100 m/s².
This helps reduce cycle times and increase production capacity in highly automated manufacturing environments.
Repeatability below 100 nm
When handling modern semiconductor components, positioning accuracy has a direct impact on process quality and reject rates.
The Fast 4PnP ultra-precision system achieves repeatability below 100 nm and meets the requirements of high-precision chip and photonics processes. Even very small components can be positioned reproducibly and reliably.
Carbon lightweight
Carbon lightweight construction for high dynamics
High accelerations require low moving masses. For this reason, JAT uses high-strength carbon materials in the Fast 4PnP ultra-precision system.
The lightweight and rigid structure enables fast motion profiles without compromising stability or precision. It also reduces the required drive forces and supports lower energy use.
Cleanroom-compatible
Cleanroom-compatible energy guidance with significantly reduced particle emissions
Conventional energy chains generate friction through mechanical joints, which can create particles. This is a critical factor in sensitive cleanroom processes.
In the Fast 4PnP ultra-precision system, the e-skin flat energy guidance from igus is fully integrated into the system and designed without conventional chain links. This significantly reduces particle emissions.
The system is suitable for cleanroom applications in:
- Semiconductor manufacturing
- Photonics
- Medical technology
- Laser-based precision processes
Frictionless
Frictionless air-bearing technology
Unlike conventional mechanical guides, the system uses contactless air bearings. This reduces friction and mechanical wear.
Key benefits include:
- Consistently high precision
- Reduced maintenance effort
- Long service life
- Low-vibration motion
- Significantly reduced particle generation
In cleanroom environments, contactless bearing technology is an important factor for stable processes.
Applications in semiconductor, laser, and electronics manufacturing
Chip handling
Modern semiconductor chips are becoming smaller and more sensitive. At the same time, requirements for positioning accuracy and process speed are increasing.
The Fast 4PnP nanopositioning system enables precise picking, placing, and positioning of sensitive chips with high process dynamics.
PCB component placement
In electronics manufacturing, components must be positioned on printed circuit boards with high repeatability.
By combining dynamics and precision, the system is suitable for high-accuracy placement processes with short cycle times.
Laser dicing and high-precision cutting
Motion dynamics are important in laser-based machining processes.
In tight curve radii, many systems have to reduce speed. This changes the laser energy density and can cause thermal damage or burned material edges.
Thanks to its high acceleration, the Fast 4PnP submicrometer system can also move through complex paths at consistently high speed. This improves machining quality and reduces thermal stress.
Photonics applications
High-precision laser and photonics applications also benefit from low-vibration and high-accuracy motion technology.
The high path accuracy supports precise machining results, even with small structures and sensitive materials.
Higher productivity with efficient energy use
Modern production environments require precision and speed, but also energy efficiency and controlled operating costs.
Thanks to its low moving mass and optimized system architecture, the Fast 4PnP nanopositioning system can achieve high dynamics with comparatively low energy use.
If maximum speed is not required, smaller motors can be used and energy consumption can be reduced further. At the same time, wear-free air-bearing technology reduces maintenance effort and downtime.
The result:
- Higher productivity
- Lower operating costs
- Reduced reject rates
- Higher process stability
Awarded the silver igus vector award
The Fast 4PnP ultra-precision system received the silver igus vector award for its system architecture.
The award recognized:
- Integrated particle-reducing energy guidance and cleanroom suitability
- The combination of precision and dynamics
- The use of air-bearing and carbon technology
With the Fast 4PnP pick-and-place system, Jenaer Antriebstechnik shows how precision automation can meet the rising requirements of microelectronics and photonics.
With the Fast 4PnP submicrometer system, JAT addresses specialized manufacturers in semiconductor, photonics, and ultra-precision applications.