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Precision Linear Actuator (Clean room) Version 1

Technical Data

Max. acceleration3 m/s2
Max. velocity0,4 m/s
Stroke50 mm (more is possible)
Height error per slide≤1 µm
Lateral error per slide≤1 µm
Max. height error of the slides to each other100 µm
Max. rolling error, yawing error, lufting error≤±100 µrad
Reproducibility in movement direction<0,5 µm
Resolution measuring system0,05 µm
  • Linear motor axis with moving magnet principle
  • For high-precision positioning of lenses

Demands

  • Use in clean rooms ISO class 100 - no abrasion or wear on the cables
  • Use in 3-shift operation on 7 days/week
  • Very high mechanical accuracy
  • Temperature stability: 22°C ±2°

Implementation

  • A common recirculating linear ball bearings for all slides
  • Base plate material selected according to the thermal expansion coefficient of the guide
  • Construction and drives offset from each other - to optimize the overall length

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